| type | small | large-scale |
| Table size (mm) | 400×280 | 450×286 |
| Measuring range (mm) | 200×150 | 250×150 |
| Focusing range (mm) | 0~100 | |
| Resolution (mm) | 0.001 | |
| Instrument accuracy | 3+L/75μm (where L is the measured length, unit: mm) | |
| Workbench load capacity (kg) | 15 | 20 |
| Objective lens magnification | 10× | 20× | 50× | 100× |
| Objective lens object-side field of view | φ30mm | φ15mm | φ6mm | φ3mm |
| Working distance of objective lens | 74mm | 69 mm | 63 mm | 41mm |