| Table size (mm) | 340×152 |
| Measuring range (mm) | 150×50 |
| Focusing range (mm) | 0~90 |
| Resolution (mm) | 0.001 |
| Instrument accuracy | 3+L/75μm (where L is the measured length, unit: mm) |
| Workbench load capacity (kg) | 10 |
| Objective lens magnification | 10× | 20× | 50× | 100× |
| Objective lens field of view in object space | φ30mm | φ15mm | φ6mm | φ3mm |
| Working distance of objective lens | 75mm | 69mm | 44mm | 26mm |