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RSG200 RF power supply for RF sputtering

Product ID:OtherRFdy002

Price: Please inquire PDF Format
Supply Ability:20SETS/MON
Port:SHENZHEN
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  • Product Introduction
  • Consulting
  • Model NumberRSG200
    Brand NameYIMA
    Payment TermsT/T, paypal
    Introduction:
    RF power supply is a plasma power supply. It is composed of RF power source, impedance matching device and impedance power meter. It is used in RF sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment in the late 1980s in China
    Technical parameters
    output power:rated power 1 ~ 100% ,continuously adjustable,
                Forward and reverse power LED display
    Power stability:≤ ±0.5%(The rated power output)
    frequency stability:≤ ±0.005%
    Power response time:Rated output start <10ms
    frequency signal:Standard sine wave, the import semiconductor vibration excitation
    signal frequency:13.56MHz/27.12MHz/40.68MHz/81.36MHz/100MHz
                  (other industrial frequency)
    Signal output form:Continuous wave; Rectangular square wave
     output impedance:50Ω
    Voltage Standing Wave Ratio:VSWR ≤ 2.0
    Harmonic wave output:Second harmonic below -50dB,Three times and higher harmonic below -55dB
    supply voltage :AC220V power supply or AC220V±15% power supply ,50/60Hz
    Efficiency:≥ 70%(200W output )
     Cooling mode:forced wind cooling
    Environment temperature 0 ~ 40
    Relative humility :< 85%
    control interface:analog interface,or adopt RS485,RS232 communication protocol
    Output interface:The standard coaxial connector output,Negative
    Long lifetime:The core parts is imported transistor,Work 24 hours a day can be used for 30 years 
    Operate mode:
    roducts using manual control panel and remote computer control for external control switch machine,LED display the value,suitable for university laboratories, research and development of scientific research institutes, also suitable for automatic production line closed loop control.  
    Rf power protection:
    1.Overheating protection 
    2. Standing wave protection
     3.Over voltage protection
     4.over-current protection
     

  • RF power supply is a plasma power supply. It is composed of RF power source, impedance matching device and impedance power meter. It is used in RF sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment in the late 1980s in China
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