PT-5SMT quartz RF plasma cleaning machine Introduction: PT-5SMT is a high-end, laboratory-grade plasma cleaning machine dedicated to ultra-clean processes. Leveraging a combination of a quartz chamber, 13.56MHz radio frequency, low temperature, and intelligent control, it perfectly addresses the three major pain points in the fields of semiconductors, optics, and biomedicine: metal contamination, uniformity, and heat sensitivity. It is an ideal equipment for small-batch research and development as well as precision production. Features: 1. Quartz chamber Zero metal contamination: Completely avoid the precipitation of metal ions from the stainless steel chamber, meeting the ultra-clean requirements of semiconductors, MEMS, optics, and biomedicine. Transparent and visible: Observe the plasma state and sample changes throughout the entire process, facilitating process debugging. Corrosion resistance: Suitable for strong corrosive gases such as O₂ and CF₄, with long service life and low maintenance costs. Low heat capacity: With air cooling, the chamber temperature remains stable at less than 30℃, protecting thermosensitive materials such as polymers and biochips. 2. 13.56MHz radio frequency system High uniformity: The radio frequency electric field is evenly distributed, the plasma density is consistent, and there are no dead zones in the treatment effect. Automatic matching: Equipped with a built-in 50Ω automatic matching network, it quickly stabilizes the plasma without the need for manual tuning. Power precision: 0–300W continuously adjustable, suitable for the entire process range from mild activation to deep etching. 3. Vacuum and gas system Dual-channel gas: Independent flow control, supporting mixed gas processes (such as Ar+O₂, CF₄+O₂). High vacuum degree: Ultimate vacuum ≤1Pa, effectively eliminating impurities within the chamber to ensure process repeatability. Low vibration: Equipped with a low-noise vacuum pump as standard, suitable for laboratory environments. 4. Intelligent control system 7-inch touch screen: Chinese interface, one-click parameter setting, support for process recipe storage (≥10 groups). Dual-mode operation: fully automatic (operate according to preset procedures) / manual (single-step debugging). Safety protection: Automatic shutdown and alarm in case of overvoltage, overcurrent, overtemperature, and abnormal vacuum conditions. Technical Specifications: Cavity material: quartz heat-resistant glass Power supply: AC220V Operating current: The total operating current of the machine (excluding the vacuum pump) is not greater than 1.2A RF power supply: adjustable from 0-200W / 0-300W (with integrated RF matching) Radio frequency: 13.56MHz Frequency offset: Less than 0.2KHz Characteristic impedance: 50 ohms, automatic matching Vacuum degree: 1pa-30Pa Gas path: Dual gas input (high-precision float flowmeter) Gas flow rate: 10—160ml/min (adjustable) Process control: PLC human-machine interface automatic and manual modes Cleaning time: adjustable from 1 to 9999 seconds Power level adjustable from 10% to 100% Inner chamber dimensions: Φ150×270Lmm, 5L Outline dimensions: 560×540×550mm L×W×H Vacuum pump: Feiyue vacuum pump VRD-4 (including oil mist filter) Vacuum chamber temperature: less than 30°C Cooling method: Forced air cooling
PT-5SMT quartz RF plasma cleaning machine Introduction: PT-5SMT is a high-end, laboratory-grade plasma cleaning machine dedicated to ultra-clean processes. Leveraging a combination of a quartz chamber, 13.56MHz radio frequency, low temperature, and intelligent control, it perfectly addresses the three major pain points in the fields of semiconductors, optics, and biomedicine: metal contamination, uniformity, and heat sensitivity. It is an ideal equipment for small-batch research and development as well as precision production.
