| Table size (mm) | 630×202 |
| Measuring range (mm) | 300×200 |
| Focusing range (mm) | 0~80 |
| Resolution of glass grating ruler (mm) | 0.0005 |
| Clear opening size of flat workbench (mm) | 300×200 |
| Clear opening size of circular workbench (mm) | φ90 |
| Workbench swing angle | ±15° |
| Instrument accuracy | 3+L/75μm (where L represents the measured length, with the unit being mm) |
| Workbench load capacity (kg) | 50 |
| Objective magnification | 10× | 20× | 50× | 100× |
| Objective lens object-side field of view (mm) | φ80 | φ40 | φ16 | φ8 |
| Working distance of objective lens (mm) | 206 | 123 | 85 | 78 |
