Introduction: Box Description: Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm Box net size: 1800mm (L) x 950mm (W) x 1700mm (H) Volume: 2.9 m3 Front window: Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional) Dimensions: 1735mm (L) x 839mm (H) Glove mouth: hard aluminum alloy or polyacetal material (optional) Caliber 220 mm, O-ring seal Gloves: Material: butyl rubber Thickness: 0.4 mm or 0.8 mm (optional) Filter: Outlet and inlet filter, filter <0.3μm Lighting: LED lighting is located at the top of the front window Leakage rate: Oxygen method and pressure change method in the case of leak detection according to ISO 10648-2:1994 / EJ/T 1096-1999 "Sealing chambers - Part 2: Sealing classification and related inspection methods" The test was carried out and the final acceptance test was carried out according to the standard of first-order sealing < 0.05 vol%/h. GP20 gas purification system Description: Automatic removal of H2O and O2 Single purification column system, automatic regeneration (optional GP200 double purification column) Closed gas circulation line Operating voltage: AC 230 V / 50-60 Hz, 10 A or AC 115 V / 50-60 Hz, 20 A (optional) Working gas: Working gas: N2, Ar, He (purity ≥99.999%) Regeneration gas: H2 accounts for 5%-10%, and the rest is working gas (purity ≥99.999%) Vacuum pump: Specifications: rotary vane vacuum pump, with oil mist filter, with gas town control Flow rate: 12 m3/h (7 cfm), double substrate, vacuum < 2 x 10-3 mbar or dry pump (optional) Circulating unit: oil-free high-speed fan Air volume: 80 m3/h Valve: KF40 high vacuum valve Leakage rate: Oxygen method and pressure change method in the case of leak detection according to ISO 10648-2:1994 / EJ/T 1096-1999 "Sealing chambers - Part 2: Sealing classification and related inspection methods" The test was carried out and the final acceptance test was carried out in accordance with the standard of the first-order sealing < 0.05 vol%/h. Control cabinet size: 600mm (L) x 800mm (D) x 870mm (H) Transition cabin Large transition chamber: Material Stainless steel type 304 (1.4301), thickness 3 mm Dimensions φ360mmx600mm(L) or φ390mmx600mm(L) (optional) Vacuum < 1 x 10-2 mbar Small transition chamber: Material Stainless steel type 304 (1.4301), thickness 2 mm Dimensions φ150mm x 330mm(L) Vacuum < 1 x 10-2 mbar Cleaning system Description: Set the appropriate time and pressure, the system can automatically replace the gas. Analyzer Oxygen Analyzer: Dimensions 205 mm (L) x 80 mm (W) x 60 mm (H) Measuring range 0-1000 ppm Other oxygen analyzers GE oxy.IQTM Oxygen Transmitter Moisture Analyzer: Dimensions 205 mm (L) x 80 mm (W) x 60 mm (H) Measuring range 0-500 ppm Other water analyzers GE VeriDriTM Dew-Point Transmitter Solvent purification system Description: Material: Stainless steel 1.4301 (US type 304), thickness 3 mm Internal dimensions: 220mm (Φ) x 450mm (H) High quality activated carbon Clean (100 grade) high efficiency purification circulatory system Description: The number of suspended particles in the controlled environment in the tank is greater than the maximum concentration limit of the required particle size (units/m3) through a high-efficiency Class 100 clean environment filtration and purification system. ≥ (suspended particle diameter) 5.0μm is less than 29/m3 ≥ (suspension particle diameter) 0.5μm is less than 3520 / m3 In line with national standards: "Cleanroom Construction and Acceptance Specifications" GB50591-2010 Clean Room and Related Controlled Environment GB/T25915.3-2010
Introduction: Box Description: Material: Stainless steel 1.4301 (SUS type 304), thickness 3 mm Box net size: 1800mm (L) x 950mm (W) x 1700mm (H) Volume: 2.9 m3 Front window: Panel: 8 mm thick safety tempered glass or 10 mm thick polycarbonate (optional) Dimensions: 1735mm (L) x 839mm (H) Glove mouth: hard aluminum alloy or polyacetal material (optional) Caliber 220 mm, O-ring seal Gloves: Material: butyl rubber Thickness: 0.4 mm or 0.8 mm (optional) Filter: Outlet and inlet filter, filter <0.3μm Lighting: LED lighting is located at the top of the front window Leakage rate: Oxygen method and pressure change method in the case of leak detection according to ISO 10648-2:1994 / EJ/T 1096-1999 "Sealing chambers - Part 2: Sealing classification and related inspection methods" The test was carried out and the final acceptance test was carried out according to the standard of first-order sealing < 0.05 vol%/h.
