| Product Model | ACU20FD-L |
| measurement range | 2SCCM~30SLM |
| Measurement and control range | Flow meter range ratio 100:1 Controller range ratio 50:1 |
| accuracy | ±0.5%F.S |
| linear | ±0.25%F.S |
| repeatability accuracy | ±0.2%F.S |
| response time | Flowmeter: <0.1s |
| Flow controller: <0.2s | |
| digital quantity | RS232/485, MODBUS protocol |
| analog quantity | 0~5V, 4-20mA, 1~5V |
| power supply | ±15VDC,24VDC |
| Operating Temperature | 0~50℃ |
| work pressure | Operating pressure drop: <0.01 MPa |
| Maximum withstand voltage | 3MPa/10MPa |
| electrical connection | DB9 hole |
| leak rate | 1×10-9Pa m3/S |
| temperature coefficient | ±0.025%F.S/℃ |
| Base material | stainless steel |
| Sealing material | Fluororubber, chloroprene rubber, nitrile rubber |
| joint | φ3,φ6,1/8",1/4" |
