| measurement range | 5SCCM~30SLM |
| accuracy | ±1.0%F.S |
| Temperature: ±1℃ | |
| linear | ±0.5%F.S |
| repeatability accuracy | ±0.2%F.S |
| response time | <2s |
| analog quantity | 0~5V, 4~20mA |
| power supply | ±15VDC,24VDC |
| Operating Temperature | 0~50℃ |
| work pressure | Operating pressure difference: 0.05~0.5Mpa |
| Maximum withstand voltage | 3MPa/10MPa |
| electrical connection | DB9 hole |
| leak rate | 1×10-9Pa m³/S |
| temperature coefficient | ±0.015%F.S/℃ |
| Base material | stainless steel |
| Sealing material | Fluororubber, chloroprene rubber, nitrile rubber |
| joint | φ3,φ6,1/8",1/4" |
