| Parameter | Specification |
|---|---|
| Model | Smarc-III-PO |
| Measurement Application | Small flat surface online inspection |
| Light Source | Semiconductor laser |
| Wavelength | λ = 635 nm |
| Laser Warranty | 1.5 years |
| Effective Beam Diameter | φ25 mm |
| Reference Surface Accuracy | λ/20 |
| Measurement Accuracy | PV better than λ/20 |
| Measurement Repeatability | PV better than λ/50 |
| RMS Repeatability | RMS better than λ/100 |
| Imaging System | Gigabit Ethernet CCD |
| Display | 15-inch LCD monitor |
| Data Analysis | Phase-shifting interferometric data processing software |
| Dimensions | 260 × 160 × 330 mm |
| Weight | 6.5 kg |
| Power Supply | 220 V, 55 Hz |
| Feature | Smarc-III-PO Laser Interferometer | Conventional Surface Inspection |
|---|---|---|
| Measurement Method | Non-contact laser interferometry | Contact or conventional optical inspection |
| Reference Accuracy | Up to λ/20 | Typically lower precision |
| Repeatability | PV < λ/50, RMS < λ/100 | More dependent on operator and equipment |
| Wavefront Analysis | Direct quantitative analysis | Often limited or indirect |
| Imaging | Gigabit Ethernet CCD | Standard imaging system |
| Online Inspection | Suitable | May require additional integration |
| Data Processing | Phase-shifting software | Basic measurement or manual evaluation |
| Application | Small flat surfaces and cover glass | General surface inspection |