| Serial number | Name | Specifications |
| 1 | Precision interferometer main machine | The planeness of beam splitter and compensation plate is better than that of 1 / 10 λ microhelix. The minimum indexing of microhelix corresponds to the stroke of moving mirror. The stroke of 0.00025mm mirror 0.625mm Fabry-Perot mirror is 90% reverse, 1% transparent, and 30mm diameter. |
| 2 | Laser and bracket | He-Ne, 6328nm, containing power |
| 3 | Frosted glass screen | Diameter 60mm |
| 4 | Adjust the rack | Expanding frame |
| 5 | other | Dual viewing screen |