SD-981M ion sputtering instrument Introduction: The SD-981M ion sputtering instrument is independently developed by Beijing Boyuan Micro Nano Technology Co., Ltd. and is suitable for SEM sample preparation. Compared with traditional sputtering equipment, this device has magnetron sputtering function, can process temperature sensitive samples, provides automatic and manual operation modes, and has vacuum adjustment and automatic ventilation functions. Its operation interface is diverse, and a rotating sample stage can be optionally equipped. The main parameters include host size, target material specifications, sample chamber size, maximum vacuum degree, coating area and rate, etc. This device is widely favored by universities and research institutions due to its efficient and stable performance. Features: SD-891M is a magnetron sputtering instrument that can coat temperature sensitive samples, such as thin films, rubber, etc. And the structure of the magnetron sputtering target head is more scientific and stable. 2. In terms of operation mode: there are two modes: automatic and manual (to meet the coating needs of more people) 3. Sputtering aspect: divided into normal startup and soft startup, can adapt to some special samples 4. Vacuum aspect: The vacuum can be adjusted, and the vacuum realizes the function of automatic ventilation and stable pressure, which avoids the inconvenience of manually adjusting the vacuum and avoids the disadvantages of fixed vacuum degree and large particle size. 5. In terms of operation interface: divided into simple interface and diversified interface. Can meet the needs of most people. 6. Sample stage: rotatable (optional) Technical Specifications: Host specifications: length 510mm x width 310mm x height 290mm (including cavity) Target material: Au (standard) 50mm × 0.1mm (D × H) Sample Room: Glass Chamber Diameter 180mm x Height 120mm (D x H) Sample table diameter: 70mm Target size: 50mm Maximum vacuum degree: 1Pa Working vacuum: 2-15Pa Timer: Digital timer 0-600S Coating area: 50mm Sputtering current: 0-50mA (adjustable) Vacuum measurement: Pirani vacuum gauge Touch screen: 4 inches Program: VPI Human Machine Interface Gas can be introduced: various types Mechanical pump: VRD-8 Speed: 0-60nm/min Host power: 100W Working voltage: 220V, 50HZ
Introduction: The SD-981M ion sputtering instrument is independently developed by Beijing Boyuan Micro Nano Technology Co., Ltd. and is suitable for SEM sample preparation. Compared with traditional sputtering equipment, this device has magnetron sputtering function, can process temperature sensitive samples, provides automatic and manual operation modes, and has vacuum adjustment and automatic ventilation functions. Its operation interface is diverse, and a rotating sample stage can be optionally equipped. The main parameters include host size, target material specifications, sample chamber size, maximum vacuum degree, coating area and rate, etc. This device is widely favored by universities and research institutions due to its efficient and stable performance.
