Photoelectron Spectrometer (XPS / ESCA)
Photoelectron Spectrometer (XPS / ESCA)
 
Introduction and principles

XPS also called Electron Spectroscopy for Chemical Analysis (ESCA) is an important method to study the surface composition. 1960's was developed by University of Uppsala, Sweden's Kai Siegbahn, etc. In view of Professor K. Siegbahn's significant contribution to the development of XPS, he was awarded the 1981 Nobel Prize in Physics.

XPS is a photoelectric effect based electron spectroscopy, which is the use of X-ray photons to excite the inner surface of the atoms of the atoms on the surface of the material through the energy of these electrons obtained by a spectrum. XPS can not only detect the chemical composition of the surface, but also to determine the chemical state of each element, therefore, in the chemical, materials science and surface science has been widely used.

XPS instrument

1 Excitation light source: X-ray (soft X-ray; Mg Kα: hv = 1253.6 eV; Al Kα: hv = 1486.6 eV);
2 electronic energy analyzer: the corresponding energy analyzer, surface analysis may only be;
3 high vacuum system: super-high vacuum chamber (UHV to avoid the collision of photoelectrons and gas molecules interference.

XPS features

In the experiment, the surface of the sample is less damaged by irradiation and can detect all elements except H and He in the periodic table and has high absolute sensitivity.
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