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DSC 300 Desktop Stage Sputtering Coating System

Product ID:SYZXlzjs010

Price: Please inquire PDF Format
Supply Ability:20SETS/MONTH
Port:SHENZHEN
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  • Product Introduction
  • Consulting
  • Model NumberDSC 300
    Brand NameSZSP
    Payment TermsT/T, paypal
    Introduction:
    The DSC desktop grade sputter coating system is suitable for rapid sputter coating scientific research, teaching and small batch proofing, and can quickly and inexpensively prepare a variety of micro-nano-thick film layers.
    The DSC 300 desktop grade sputter coating system features integration, small footprint, and flexibility. No 380V industrial power is required. No additional chillers are required. An oil-free dry-pump molecular pump set is used, eliminating the need to worry about vacuum system and operating environment pump oil contamination. . The core components use world-class brands to ensure that the equipment has excellent quality and stability and reliability. The touch screen control interface brings a simple and easy operation experience.
    Technical Parameters:
    Technical Specifications: Parameters
    Pump set: Germany Leybold Vacuum molecular pump; optional 90L/s or 250L/s molecular pump speed
    Background vacuum: <5*10-6 Torr
    Chamber module: Standard flanged interface cavity Ø 300 mm
    Substrate size: Substrate area Ø 100 mm, rotatable substrate stage; optional substrate heating module 300 degrees
    Target Module: 2-inch or Ø60 circular planar magnetron source; optional magnetic circuit module; optional ion source
    Power Module: 3 sets of 500W DC sputtering power supply, optional RF power supply; optional bias power supply
    Gas module: 2 MFC 50 or 20 sccm flowmeters with optional closed-loop reaction gas controller
    Vacuum gauge: Germany Leybold Vacuum full-scale compound gauge + MKS Pirani gauge
    Operation method: Touch screen operation
    Size: 700mm long *600mm wide *1460mm high
    Power supply: 220V AC, 50/60Hz grounded three-pin plug
    Power consumption: <3KW
    Cooling Module: Integrated 1 3L Water Tank Cooler

  • Introduction:
    The DSC desktop grade sputter coating system is suitable for rapid sputter coating scientific research, teaching and small batch proofing, and can quickly and inexpensively prepare a variety of micro-nano-thick film layers.
    The DSC 300 desktop grade sputter coating system features integration, small footprint, and flexibility. No 380V industrial power is required. No additional chillers are required. An oil-free dry-pump molecular pump set is used, eliminating the need to worry about vacuum system and operating environment pump oil contamination. . The core components use world-class brands to ensure that the equipment has excellent quality and stability and reliability. The touch screen control interface brings a simple and easy operation experience.
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