Introduction: The desktop-level SEM scanning electron microscopy multifunctional ion sputtering apparatus is particularly suitable for various uses such as gold spraying of FE-SEM high-resolution scanning electron microscope samples and plasma cleaning of samples. The use of a molecular pump pump to obtain a background vacuum of <9*10-6 Torr allows magnetron sputtering to be performed under mTorr pressure to obtain a more exquisite gold film that satisfies FE-SEM high resolution scanning electron microscopy and other sample processing. . At the same time, it has a remote RF RF ion source to achieve sample cleaning and high-efficiency, low-plasma bombardment damage. The core components are made from world-class brand oil-free molecular pump units that are silent, do not need to worry about the vacuum system and the environment pump oil contamination. Ensure that the equipment has excellent quality and stability and reliability. Touch screen interface operation, plug and play. Technical Parameters: Function: Applicable to conventional coating such as gold spray, smashing, etc., and plasma cleaning for electron microscope samples Pump set: imported brand molecular pump set, 80L/s pumping speed molecular pump and oil-free diaphragm pump Background vacuum: <9*1 0'6 Torr Chamber module: ~100 X 100 X 200 mm double cavity structure Substrate size: substrate area ~ 0 50_ Sputtering Source: Compatible with 0 30mm or 1 inch round material Sputtering Power: 1 20W DC Sputtering Power Supply RF Plasma Source: Remote RF Radio Frequency Plasma Source, 20WMax Gas module: 1 MFC 50 flow meter Vacuum gauge: imported brand full scale compound gauge Operation method: touch screen operation Size: ~450 length*450 width*560 height Weight: ~50Kg Power: 220VAC, 50/60Hz grounded three-pin plug Power Consumption: 300 W Max
