CXF-320 / 3001 Magnetic Levitation Molecular Pump / On board Maglev Pump Introduction
CXF-320 / 3001 magnetic levitation molecular pump can be used in silicon etching, ion implantation, glass coating, PVD coating, scientific research applications, surface analysis, accelerator, solar energy, heat treatment and other fields. Features
High cleanliness, maintenance-free, low vibration, installation at any angle, higher front pressure resistance, integrated controller
Five-axis magnetic suspension bearing, adjustable speed, rotor operation monitoring and automatic balancing, automatic protection when power is cut off, temperature management system
Anti-corrosion, low noise, energy saving, smaller size and lighter weight Technical parameter:
Pumping rate (l/s): N2: 3000 Ar: 2750 He: 2300 H2: 1100
Ultimate pressure (Pa): 10-7 (rubber seal)
Rated speed (rpm): 21000
Downtime (min): ≤26
Cooling method: water cooling
Compression ratio: N2:>1E8 Ar:>1E8 He:>1E4 H2:>1E3
Inlet flange: DN320 ISO F (standard)
Startup time (min): ≤12
Installation method: any angle
Recommended pumping speed of backing pump (l/s): ≥30
Introduction
CXF-320 / 3001 magnetic levitation molecular pump can be used in silicon etching, ion implantation, glass coating, PVD coating, scientific research applications, surface analysis, accelerator, solar energy, heat treatment and other fields.
